This MFC is mainly based on the CMOSens mass flow sensor used which is a result of Sensirion's advanced sensor technology. This is a combination of a high precision sensor element in conjunction with an integrated amplification and A/D converter circuit, on one single CMOS chip.
Mass Flow Controller SFC4000 - Sensirion
Some Features
- Very high control speed (T90<100ms)
- Wide control range (1:1000)
- High accuracy (0.8% m.v. for 10-100% FS)
- Analog interface 0-5 V
From -
Sensirion AG
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